个人信息Personal Information
副教授
博士生导师
硕士生导师
性别:男
毕业院校:开云平台首页
学位:博士
所在单位:物理学院
学科:等离子体物理
办公地点:三束实验室3号楼
电子邮箱:kaizhao@dlut.edu.cn
个人简介Personal Profile
赵凯,男,副教授,博士生导师,等离子体模拟与实验课题组(PSEG)成员。
主要从事于低气压射频容性耦合等离子体的实验诊断和数值模拟研究。近年来,负责国家自然科学基金青年基金项目1项,博士后科学基金特别资助项目1项,博士科学基金面上项目1项,企事业项目多项。曾获得“辽宁省优秀博士学位论文奖”、周培源基金会“蔡诗东等离子体物理奖”。在国内外学术期刊上累计发表学术论文20余篇,申请中国/国际发明专利10项,授权5项。利用自主研制的电磁诊断工具首次在低气压甚高频容性放电中观察到非线性驻波效应,并结合非线性电磁模型揭示了其物理机制,相关成果发表于美国物理学会会刊《Physical Review Letters》上。
学习和科研经历
2015.09-2019.08 开云平台首页
,博士学位
2017.10-2018.10 美国休斯顿大学,博士联合培养
2019.09-2022.08 开云平台首页
,博士后
2022.08-至今 开云平台首页 ,副教授
主要研究方向
(1)低气压射频容性耦合等离子体实验诊断研究;
(2)甚高频容性耦合等离子体中电磁效应和等离子体均匀性的实验与模拟研究;
(3)容性放电中电非对称效应的实验研究;
(4)直流/射频混合放电的实验研究;
(5)kHz超低频容性耦合等离子体特性研究;
(6)射频等离子体的电磁诊断工具开发研究;
(7) 面向光伏电池制备工艺的大面积PECVD装备研究。
PSEG课题组,更多信息请访问:http://pseg.dlut.edu.cn/index.htm
代表性论文
[1] Kai Zhao, De-Qi Wen, Yong-Xin Liu*, Michael A. Lieberman, Demetre J. Economou, and You-Nian Wang*. Observation of nonlinear standing waves excited by plasma-series-resonance-enhanced harmonics in capacitive discharges [J]. Physical Review Letters, 2019, 122(18): 185002.
[2] Yang Zhou, Kai Zhao*, Fang-Fang Ma, Yong-Xin Liu, Fei Gao, Julian Schulze, and You-Nian Wang. Low-frequency dependence of plasma characteristics in dual-frequency capacitively coupled plasma sources [J]. Applied Physics Letters, 2024, 124(6): 064102.
[3] Kai Zhao, Yong-Xin Liu, De-Qi Wen, Demetre J. Economou, and You-Nian Wang*. A new B-dot probe circuit for magnetic diagnostics of radio frequency discharges [J]. Review of Scientific Instruments, 2018, 89(10): 105104.
[4] Kai Zhao, Yong-Xin Liu, E Kawamura, De-Qi Wen, M A Lieberman, and You-Nian Wang*. Experimental investigation of standing wave effect in dual-frequency capacitively coupled argon discharges: role of a low-frequency source [J]. Plasma Sources Science and Technology, 2018, 27(5): 055017.
[5] Kai Zhao, Yong-Xin Liu*, Fei Gao, Gang-Hu Liu, Dao-Man Han, and You-Nian Wang. Experimental investigations of the plasma radial uniformity in single and dual frequency capacitively coupled argon discharges [J]. Physics of Plasmas, 2016, 23(12): 123512.
[6] Kai Zhao, Zi-Xuan Su, Jia-Rui Liu, Yong-Xin Liu*, Yu-Ru Zhang, Julian Schulze, Yuan-Hong Song, and You-Nian Wang. Suppression of nonlinear standing wave excitation via the electrical asymmetry effect [J]. Plasma Sources Science and Technology, 2020, 29(12): 124001.
[7] Kai Zhao, Yongxin Liu, Quanzhi Zhang, Demetre J Economou, and Younian Wang*. Magnetic probe diagnostics of nonlinear standing waves and bulk ohmic electron power absorption in capacitive discharges [J]. Plasma Science and Technology, 2021, 23(11): 115404.
[8] Kai Zhao, Yu-Qing Guo, Quan-Zhi Zhang*, Yong-Xin Liu, and You-Nian Wang. Experimental Investigation of Nonlinear Standing Waves in DC/VHF Hybrid Capacitive Discharges [J]. IEEE Transactions on Plasma Science, 2021, 49(11): 3392.
[9] Fang-Jie Zhou, Kai Zhao*, De-Qi Wen, Jian-Kai Liu, Yong-Xin Liu, and You-Nian Wang. Simulation of nonlinear standing wave excitation in very-high-frequency asymmetric capacitive discharges: roles of radial plasma density profile and rf power [J]. Plasma Sources Science and Technology, 2021, 30(12): 125017.
[10] Zi-Xuan Su, De-Hua Shi, Yong-Xin Liu*, Kai Zhao*, Fei Gao, and You-Nian Wang. Radially-dependent ignition process of a pulsed capacitively coupled RF argon plasma over 300 mm-diameter electrodes: multi-fold experimental diagnostics [J]. Plasma Sources Science and Technology, 2021, 30(12): 125013.
[11] Peng-Cheng Du, Fang-Jie Zhou, Kai Zhao*, Yong-Xin Liu, Fei Gao*, and You-Nian Wang. Measurement of neutral gas temperature in inductively coupled Ar and Ar/O2 plasmas [J]. Journal of Applied Physics, 2022, 132(4): 043302.