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Scientific Research
赵书霞
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Associate Professor Supervisor of Master's Candidates
Scientific Research
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zhaoshuxia, Fei Gao, wangyounian.Dynamic investigation of mode transition in inductively coupled plasma with a hybrid model[J],JOURNAL OF PHYSICS D-APPLIED PHYSICS,2021,42(22)
崔文俐, 赵书霞.射频容性耦合放电流体力学仿真模型的多样性分析[A],2017,1
王彦洁, 赵书霞.射频感性耦合的电负性双原子分子气体放电的空间特征形貌[A],2017,1
赵书霞, 高磊, 田宇, 王彦洁.复变函数n√z的多值性问题及其教学意义[J],教育教学论坛,2017,52:191-193
Yang, Wei, Zhao, Shu-Xia, Wen, De-Qi, Liu, Yong-Xin, Li, Xue-Chun, Wang, You-Nian, YN (reprint author), Dalian Univ Technol, Key Lab Mat Modificat Laser Ion & Electron Beams, Sch Phys & Optoelect Technol, Minist Educ, Dalian 116024, Peoples R China..F-atom kinetics in SF6/Ar inductively coupled plasmas[J],JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,2016,34(3)
Wang Xifeng, Song Yuanhong, Zhao Shuxia, Dai Zhongling, Wang Younian, Song, YH (reprint author), Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China..Hybrid Simulation of Duty Cycle Influences on Pulse Modulated RF SiH4/Ar Discharge[J],PLASMA SCIENCE & TECHNOLOGY,2016,18(4):394-399
Patents
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Published Books
Mode Transition and Hysteresis in Inductively Coupled Plasma Sources
Research Projects
高密度感应耦合等离子体源合作研究, 企事业单位委托科技项目, 2013/01/25, 结题
射频感性耦合碳氟性等离子体的放电机理和基片偏压效应的研究, 主管部门科技项目, 2013/10/28-2017/05/01, 结题
碳氟性等离子体的放电机理和刻蚀过程的研究, 国家自然科学基金项目, 2013/09/25-2016/12/31, 结题
大功率低压射频感性耦合负氢离子源的物理基础研究, 国家科技部, 2014/12/31, 结题
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