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SONG Yuan-Hong

Personal Information

Professor Supervisor of Doctorate Candidates Supervisor of Master's Candidates

Research Focus

[1]
低温等离子体物理基础
[2]
非对称射频容性耦合放电电子动力学及加热机理研究
[3]
射频容性耦合反应性等离子体刻蚀仿真研究
[4]
甚高频等离子体增强化学气相沉积仿真研究
[5]
电负性等离子体不稳定性研究
[6]
微重力复杂等离子体放电特性

Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

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